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Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
Japanese Only
Part Number
Configured Part Number is shown.
Model code | Tube O.D. øD | Pad O.D. ød | B | L | Tube end C | E | Connection config. code |
---|---|---|---|---|---|---|---|
VPMB0.7RM[5]-180J | 1.8 | 0.7 | 15 | 4 | 8.4 | 12 | -T4 |
VPMB0.7RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB1RM[5]-180J | 1.8 | 1 | 8.4 | 12 | |||
VPMB1RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB1.5RM[5]-180J | 1.8 | 1.5 | 8.4 | 12 | |||
VPMB1.5RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB2RM[5]-180J | 1.8 | 2 | 8.4 | 12 | |||
VPMB2RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB3RM[5]-180J | 1.8 | 3 | 8.4 | 12 | |||
VPMB3RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB4RM[5]-180J | 1.8 | 4 | 8.4 | 12 | |||
VPMB4RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB6R[5]-180J | 1.8 | 6 | 19.5 | 7 | 8.4 | 12.5 | -T8 |
VPMB6RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
VPMB8R[5]-180J | 1.8 | 8 | 18 | 5.5 | 8.4 | 12.5 | |
VPMB8RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
VPMB10R[5]-180J | 1.8 | 10 | 27 | 8 | 8.4 | 13.7 | -M4 |
VPMB10R[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB15R(A)[5]-180J | 1.8 | 15 | 28(29) | 9(10) | 8.4 | 13.7 | |
VPMB15R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB20R(A)[5]-180J | 1.8 | 20 | 31.2(32.2) | 10(11) | 8.4 | 13.7 | -M6 |
VPMB20R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB25R(A)[5]-180J | 1.8 | 25 | 32.2(33.2) | 11(12) | 8.4 | 13.7 | |
VPMB25R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB30R(A)[5]-180J | 1.8 | 30 | 32.2(35.2) | 11(14) | 8.4 | 13.7 | |
VPMB30R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB40R(A)[5]-180J | 1.8 | 40 | 35.2(38.7) | 14(17.5) | 8.4 | 13.7 | |
VPMB40R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB50R(A)[5]-180J | 1.8 | 50 | 36.2(39.2) | 15(18) | 8.4 | 13.7 | |
VPMB50R(A)[5]-4J[9] | 4 | 10.9 | 17.5 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Group Material | Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) | Metal parts material |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SGD 15.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 8 | 5.5 | 18 | M4 × 0.7 | 3 | Standard Specifications | ||
SGD 15.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 8 | 5.5 | 18 | M4 × 0.7 | 1.8 | Standard Specifications | ||
SGD 15.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 8 | 5.5 | 18 | M4 × 0.7 | 3 | Standard Specifications | ||
SGD 15.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 8 | 5.5 | 18 | M4 × 0.7 | 1.8 | Standard Specifications | ||
SGD 18.53 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 8 | 5.5 | 18 | M4 × 0.7 | 3 | Standard Specifications | ||
SGD 18.53 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 8 | 5.5 | 18 | M4 × 0.7 | 1.8 | Standard Specifications | ||
SGD 25.01 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 25.40 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 39.59 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 4 | Copper-free specification | ||
SGD 17.09 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 17.09 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 16.35 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 16.35 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 17.74 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 17.74 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 17.74 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 17.74 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.53 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 20.63 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 27.17 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 27.58 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 17.55 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 17.55 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 16.80 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 16.80 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 21.46 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 21.62 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 27.17 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 27.58 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 17.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 17.55 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 16.80 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 16.80 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 18.20 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 21.46 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
SGD 21.62 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.44 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.64 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 23.61 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.44 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.64 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.13 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.63 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 23.61 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | 10 | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.44 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.64 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 23.61 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.44 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 18.64 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.13 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 21.12 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 23.61 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.94 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.14 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.63 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 24.10 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 29.57 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.94 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 19.14 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 20.63 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 24.41 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
SGD 24.10 | 1 Piece(s) | 9 Day(s) or more | - | Small | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications |
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Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
---|---|---|---|---|---|
Vacuum Outlet Direction | Horizontal | Fall Prevention Valve | None | Direct Attached Filter | None |
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