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Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.
Part Number
Configured Part Number is shown.
XLA-16-2M9PLB
Type | Air-Actuated Vacuum Valve | Application | Single Use |
---|---|---|---|
Mounting Orientation | Direct | Number of Ports | 3-Port Valve |
Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Pipe Port Type | Flange | Flange Type | NW |
Flange Nominal | 16 | Seal Type | Bellows Seal |
Indicator | No indicator | Pilot Port Direction | Flange side |
Show More | |||
Temperature Range(°C) | 5 to 60℃ (no heater) | Switch Part Number | M9P |
Number of Switches | 1 pc. (Detection position: valve open) | Seal material | FKM (Formula No.: 1349-80) |
Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None |
Length of Lead Wire for Switch(m) | 3 | Heater Yes/No | None |
Show Less |
XLA external appearance (side)
Model | XLA-16 | XLA (V)-25 | XLA-40 | XLA-50 | XLA-63 | XLA-80 | |
---|---|---|---|---|---|---|---|
Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
Fluids | Inert gas vacuum | ||||||
Operating Temperature (°C) | XLA | 5 to 60 (5 to 150 for high temperature type) | |||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
Flange Type | KF (NW) | KF (NW) / K (DN) | |||||
Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | ||||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||||
Pilot Pressure MPa (G) | 0.4 to 0.7 | ||||||
Pilot Port Connection Port Diameter | XLA | M5 | Rc 1/8 | ||||
Weight (kg) | XLA | 0.25 | 0.45 | 1.1 | 1.6 | 2.9 | 5.0 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
With solenoid valve
Valve side exhaust
By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.
XLA air-operated type dimensional drawing
Note: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for more details.
(Unit: mm)
Model | A | B | C | D | E Note 1: | Fn | Fd | G | H |
---|---|---|---|---|---|---|---|---|---|
XLA-16 | 40 | 103 | 38 | 1 | - | 30 | - | 17 | 40 |
XLA-25 | 50 | 113 | 48 | 1 | 12 | 40 | - | 26 | 39 |
XLA-40 | 65 | 158 | 66 | 2 | 11 | 55 | - | 41 | 63 |
XLA-50 | 70 | 170 | 79 | 2 | 11 | 75 | - | 52 | 68 |
XLA-63 | 88 | 196 | 100 | 3 | 11 | 87 | 95 | 70 | 69 |
XLA-80 | 90 | 235 | 117 | 3 | 11 | 114 | 110 | 83 | 96 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Part Number |
---|
XLA-16-2M9PLB |
Part Number | Minimum order quantity | Volume Discount | Days to Ship | Solenoid Type | Flange Type | Flange Nominal | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | M9P | 1 pc. (Detection position: valve open) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 3 | None |
Part Number |
---|
Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 3-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLA-16-2M9PLB in the Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series series.
Part Number |
---|
XLA-16-2-XP1A |
XLA-16-2-XS1A |
XLA-16-2-XT1A |
XLA-16-2M9PZA |
XLA-16A-2 |
XLA-16A-2M9// |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Solenoid Type | Flange Type | Flange Nominal | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | Barrel Perfluoro (Formula No.: 70W) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | VMQ (Formula No.: 1232-70) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | FKM for Plasma (Formula No.: 3310-75) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | - | NW | 16 | No indicator | Flange side | 5 to 60°C | M9P | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
SGD 623.00 | 1 Piece(s) | Quote | Single | NW | 16 | With indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | - | None | ||
SGD 626.85 | 1 Piece(s) | Quote | Single | NW | 16 | With indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | - | None |
Part Number |
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