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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series (XLA-63D-2M9BA)
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of October 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XLA-63D-2M9BA
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series Specifications
XLA external appearance (side)
| Model | XLA-16 | XLA (V)-25 | XLA-40 | XLA-50 | XLA-63 | XLA-80 | |
|---|---|---|---|---|---|---|---|
| Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
| Fluids | Inert gas vacuum | ||||||
| Operating Temperature (°C) | XLA | 5 to 60 (5 to 150 for high temperature type) | |||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
| Flange Type | KF (NW) | KF (NW) / K (DN) | |||||
| Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | ||||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 | ||||||
| Pilot Port Connection Port Diameter | XLA | M5 | Rc 1/8 | ||||
| Weight (kg) | XLA | 0.25 | 0.45 | 1.1 | 1.6 | 2.9 | 5.0 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Structure/Operation
With solenoid valve
Valve side exhaust
By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.
Drawing
XLA air-operated type dimensional drawing
Note: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for more details.
(Unit: mm)
| Model | A | B | C | D | E Note 1: | Fn | Fd | G | H |
|---|---|---|---|---|---|---|---|---|---|
| XLA-16 | 40 | 103 | 38 | 1 | - | 30 | - | 17 | 40 |
| XLA-25 | 50 | 113 | 48 | 1 | 12 | 40 | - | 26 | 39 |
| XLA-40 | 65 | 158 | 66 | 2 | 11 | 55 | - | 41 | 63 |
| XLA-50 | 70 | 170 | 79 | 2 | 11 | 75 | - | 52 | 68 |
| XLA-63 | 88 | 196 | 100 | 3 | 11 | 87 | 95 | 70 | 69 |
| XLA-80 | 90 | 235 | 117 | 3 | 11 | 114 | 110 | 83 | 96 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Notes
- *See the catalog for information on products other than those above.
- *The product images are representative images only.
| Part Number |
|---|
| XLA-63D-2M9BA |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Solenoid Type | Flange Type | Flange Nominal | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | Single | [Others] DN | 63 | No indicator | Flange side | 5 to 60℃ (no heater) | M9B | 2 pcs. (Detection position: valve open/closed) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 0.5 | None |
Loading...
Basic Information
| Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 3-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLA-63D-2M9BA in the Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series series.
Specification/Dimensions
-
type
- XLA-16
- XLA-25
- XLA-40
- XLA-50
- XLA-63
- XLA-80
-
Solenoid Type
- Single
-
Flange Type
- NW
- Others
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Indicator
- No indicator
- With indicator
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 60°C
- 5 to 60℃ (no heater)
- 5 to 150
- 5 to 150°C (no heater)
- 5 to 150℃
- 5 to 150°C (with heater for 100°C)
- 5 to 150°C (with heater for 120℃)
-
Switch Part Number
-
Number of Switches
- 1 pc. (Detection position: valve closed)
- 1 pc. (Detection position: valve open)
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. (Detection position: valve open/closed)
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
-
Seal material
- Chemraz (Compound No.: SSE38)
- Chemraz (Formula No.: SSE38)
- Barrel Perfluoro (Compound No.: 70 W)
- Barrel Perfluoro (Formula No.: 70W)
- Chemraz (Compound No.: SS592)
- Chemraz (Formula No.: SS592)
- Chemraz (Compound No.: SS630)
- Chemraz (Formula No.: SS630)
- VMQ (Formula No.: 1232-70)
- FKM (Formula No.: 1349-80)
- EPDM (Formula No.: 2101-80)
- FKM for Plasma (Formula No.: 3310-75)
- Kalrez (Compound No.: 4079)
- Kalrez (Formula No.: 4079)
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Similar Part Numbers
| Part Number |
|---|
| XLA-16-2-XP1A |
| XLA-16-2-XS1A |
| XLA-16-2-XT1A |
| XLA-63D-2M9NA |
| XLA-63D-2M9NLA |
| XLA-63DA-2A93LB |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Solenoid Type | Flange Type | Flange Nominal | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | Barrel Perfluoro (Formula No.: 70W) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | VMQ (Formula No.: 1232-70) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | Single | NW | 16 | No indicator | Flange side | 5 to 60℃ (no heater) | No auto-switch (no magnet) | No auto switch | FKM for Plasma (Formula No.: 3310-75) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | Single | [Others] DN | 63 | No indicator | Flange side | 5 to 60℃ (no heater) | M9N | 2 pcs. (Detection position: valve open/closed) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | Single | [Others] DN | 63 | No indicator | Flange side | 5 to 60℃ (no heater) | M9N | 2 pcs. (Detection position: valve open/closed) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | Single | [Others] DN | 63 | With indicator | Flange side | 5 to 60℃ (no heater) | A93 | 1 pc. (Detection position: valve open) | FKM (Formula No.: 1349-80) | External: hard anodized aluminum, Internal: base material | None | 3 | None |
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