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Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 24/11/2024 to 7:00 (SGT) 25/11/2024. We apologize for the inconvenience.
Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (Part Numbers)

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

: 30; 60; 90

Part Number
XLC-16-2
XLC-16-2M9//
XLC-16-2M9BA
XLC-16-2M9BC
XLC-16-2M9BLA
XLC-16-2M9BZA
XLC-16-2M9NA
XLC-16-2M9NC
XLC-16-2M9PLB
XLC-16K-2
XLC-16K-2-XA
XLC-16L-2
XLC-16L-2-XA
XLC-16L-2M9//
XLC-16LH0-2
XLC-25-2
XLC-25-2A90LA-XQ1B
XLC-25-2A93A
XLC-25-2A93B
XLC-25-2M9//
XLC-25-2M9BA
XLC-25-2M9BC
XLC-25-2M9BLA
XLC-25-2M9BLA-XQ1B
XLC-25-2M9BLC-XAP1A
XLC-25-2M9BZA
XLC-25-2M9NA
XLC-25-2M9NC
XLC-25-2M9NLA
XLC-25-2M9NMA
XLC-25-2M9PZA-XA
XLC-25H0-2
XLC-25H0-2M9NJLA
XLC-25H5-2
XLC-25H5-2-XS1A
XLC-25K-2
XLC-25K-2M9//
XLC-25K-2M9BLA
XLC-25L-2
XLC-25L-2M9//
XLC-25L-2M9BA
XLC-25L-2M9BA-XQ1B
XLC-25L-2M9BLA
XLC-25L-2M9BLA-XA
XLC-25L-2M9NMA
XLC-25LH0-2
XLC-25LH0-2-XP1A
XLC-25LH0-2-XQ1A
XLC-25LH5-2M9NJLC
XLC-25M-2M9//
XLC-25M-2M9BLA
XLC-40-2
XLC-40-2A93A
XLC-40-2M9//
XLC-40-2M9//-XS1A
XLC-40-2M9BA
XLC-40-2M9BLA
XLC-40-2M9BLC-XN1A
XLC-40-2M9BZA
XLC-40-2M9BZC-XN1A
XLC-40-2M9NA
XLC-40-2M9NC
XLC-40-2M9NLA
XLC-40-2M9NZA
XLC-40H0-2
XLC-40H4-2
XLC-40H5-2
XLC-40H5-2-XAN1A
XLC-40H5-2-XAP1A
XLC-40H5-2-XAQ1A
XLC-40H5-2-XAR1A
XLC-40H5-2-XAR2A
XLC-40H5-2-XAR3A
XLC-40H5-2-XAS1A
XLC-40H5-2-XAT1A
XLC-40K-2M9BMA
XLC-40L-2A93A
XLC-40L-2M9//
XLC-40L-2M9BA
XLC-40L-2M9BA-XQ1B
XLC-40L-2M9NMA
XLC-40LH0-2
XLC-40LH0-2-XQ1A
XLC-40LH5-2
XLC-40LH5-2M9NJLC
XLC-40M-2M9BA
XLC-50-2
XLC-50-2M9//
XLC-50-2M9BA
XLC-50-2M9BLA

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Sonic Speed Conductance	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Body Surface Treatment	Seal Change Location	Length of Lead Wire for Switch (m)	Heater Yes/No
SGD 642.37	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9B (Z) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	5	None
SGD 729.05	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange side	5 to 60	D-M9P (L) solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, left	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, left	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, internal: anodic oxidation	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, back	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, back	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, internal: anodic oxidation	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, back	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	5L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-A90 (L) reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	1 pc. valve closed	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9B (Z) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9N (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9N (M) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 60	D-M9P (Z) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, internal: anodic oxidation	None	5	None
SGD 689.50	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 150	D-M9NJL	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	25	14L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, left	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, left	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, left	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 1,026.80	1 Piece(s)	61 Day(s)	KF	25	14L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	0.5	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, internal: anodic oxidation	None	3	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 60	D-M9N (M) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, back	5 to 150	D-M9NJL	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	With heater for 120℃
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, right	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	14L/S	Flange surface, right	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
SGD 991.55	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	No auto-switch (with magnet)	No switch	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
SGD 1,075.67	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	1 pc. valve closed	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	3	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9B (Z) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9B (Z) solid-state auto switch	1 pc. valve closed	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9N (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 60	D-M9N (Z) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 100°C
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	Barrel Perfluoro 70W	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	Chemraz SS630	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	Chemraz SSE38	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, left	5 to 60	D-M9B (M) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	0.5	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 60	D-M9N (M) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, back	5 to 150	D-M9NJL	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	With heater for 120℃
-	1 Piece(s)	Quote	KF	40	45L/S	Flange surface, right	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 1,205.63	1 Piece(s)	Quote	KF	50	80L/S	Flange side	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	50	80L/S	Flange side	5 to 60	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	50	80L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	50	80L/S	Flange side	5 to 60	D-M9B (L) solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None

Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

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120 Part Numbers

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Specification/Dimensions

Flange Type
- KF
- K
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Sonic Speed Conductance
5L/S

14L/S

45L/S

80L/S

160L/S

200L/S
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 60°C
- 5 to 150
- 5 to 150℃
Clear
Switch Part Number
F7NJ

D-M9B (L) solid-state auto switch

D-M9B (M) solid-state auto switch

D-M9B (Z) solid-state auto switch

D-M9B solid-state auto switch

D-M9N (L) solid-state auto switch

D-M9N (M) solid-state auto switch

D-M9N (Z) solid-state auto switch

D-M9N solid-state auto switch

D-M9NJL

D-M9P (L) solid-state auto switch

D-M9P (Z) solid-state auto switch

D-M9PJL

M9B

M9J/

M9N

M9NJ

M9P

M9PJ

A90

D-A90 (L) reed auto switch (Flange size 16 not supported)

A93

D-A93 (L) reed auto switch (Flange size 16 not supported)

D-A93 reed auto switch (Flange size 16 not supported)

No auto-switch (no magnet)

No auto-switch (with magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
Clear
Seal material
Chemraz SSE38

Barrel Perfluoro 70W

Barrel Perfluoro (Compound No.: 70 W)

Chemraz SS592

Chemraz SS630

VMQ 1232-70

VMQ (Formula No.: 1232-70)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80

EPDM (Formula No.: 2101-80)

FKM for Plasma 3310-75

Kalrez 4079

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
Clear
Seal Change Location
Valve seal 1 / valve seal 2

Valve seal 1 / valve seal 2 / external seal

External seal

None
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
Clear
type
- XLC
- XLC-16
- XLC-25
- XLC-40
- XLC-50
- XLC-63
- XLC-80
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

61 Day(s) or Less
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m³/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

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MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

Days to Ship

Specify Alterations

Tech Support

Payment Method more

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

Amount of leakage(Pa·m³/s)