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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (XLC-63-2M9NA)

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series XLC-63-2M9NA

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

XLC-63-2M9NA

Configured Specifications

TypePilot Vacuum ValveApplicationSingle Use
Mounting OrientationDirectNumber of Ports2-Port Valve
Switching Type2-Position Normally ClosedPipe Port TypeFlange
Flange TypeKFFlange Nominal63
Seal TypeBellows SealSonic Speed Conductance160L/S
Pilot Port DirectionFlange sideTemperature Range(°C)5 to 60
Show More
Switch Part NumberD-M9N solid-state auto switchNumber of Switches2 pcs. valve open/closed
Seal materialFKM 1349-80Amount of leakage(Pa·m3/s)Internal: 1.3 × 10-10, External: 1.3 × 10-11
Body Surface TreatmentExternal: hard anodized aluminum, Internal: base materialSeal Change LocationNone
Length of Lead Wire for Switch(m)0.5Heater Yes/NoNone
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■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLC-63-2M9NA
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No
1 Piece(s) Quote KF63160L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None
Part Number
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No
  1. 1

Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLC-63-2M9NA in the Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series series.

Similar Part Numbers

Part Number
XLC-16-2M9BA
XLC-16-2M9BC
XLC-16-2M9BLA
XLC-63-2M9NA-XQ1A
XLC-63D-2M9//
XLC-63D-2M9BB
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF63160L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

-

1 Piece(s) Quote K63160L/SFlange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote K63160L/SFlange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None
Part Number
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

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