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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Japanese Only
Part Number
Configured Part Number is shown.
■Please refer to the following for the details of the auto switch D-F7NJ.
■Please refer to the following for the details of the auto switch D-M9NJ.
■Please refer to the following for the details of the auto switch D-M9NJ.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
SGD 602.82 | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange side | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 16 | With indicator | Flange surface, left | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | With indicator | Flange surface, back | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | With indicator | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 16 | With indicator | Flange surface, back | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | With indicator | Flange surface, back | 5 to 150 | No auto-switch (no magnet) | No switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange surface, left | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 16 | No indicator | Flange surface, back | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
SGD 621.95 | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-A90 reed auto switch (Flange size 16 not supported) | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
SGD 672.93 | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
SGD 716.22 | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
SGD 708.63 | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 1 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
SGD 675.50 | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, left | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | D-A90 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, internal: anodic oxidation | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | With indicator | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × -8, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | 0.5 | None | ||
SGD 641.08 | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, left | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, left | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, back | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, back | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, right | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, right | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | No indicator | Flange surface, right | 5 to 150 | No auto-switch (no magnet) | No switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange side | 5 to 60 | D-M9P solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange side | 5 to 150 | D-M9NJL | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange side | 5 to 150 | D-M9PJL | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange surface, back | 5 to 60 | No auto-switch (with magnet) | No switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | With indicator | Flange surface, right | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 40 | No indicator | Flange surface, back | 5 to 60 | No auto-switch (no magnet) | No switch | Kalrez 4079 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
- | 1 Piece(s) | Quote | KF | 50 | No indicator | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 50 | No indicator | Flange side | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None |
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Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Elastic Seal |
Specification/Dimensions
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Indicator
- No indicator
- With indicator
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
- F7NJ
- D-M9B solid-state auto switch
- D-M9N solid-state auto switch
- D-M9NJL
- D-M9P solid-state auto switch
- D-M9PJL
- M9B
- M9N
- M9NJ
- M9P
- M9PJ
- A90
- D-A90 reed auto switch (Flange size 16 not supported)
- A93
- D-A93 reed auto switch (Flange size 16 not supported)
- No auto-switch (no magnet)
- No auto-switch (with magnet)
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × -10, External: 1.3 × -10
- Internal: 1.3 × -8, External: 1.3 × -10
- Internal: 1.3 × -8, External: 1.3 × -8
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-8
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-8
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLF
- XLF-16
- XLF-25
- XLF-40
- XLF-50
- XLF-63
- XLF-80
-
Flange Type
- KF
- K
-
CAD
- 2D
- 3D
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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