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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLG-16-2
XLG-16-2-XN1A
XLG-16-2-XN1B
XLG-16-2-XN1C
XLG-16-2M9//
XLG-16-2M9BA
XLG-16-2M9BC
XLG-16-2M9BLA
XLG-16-2M9BLB
XLG-16-2M9BZA
XLG-16-2M9NA
XLG-16-2M9NLA
XLG-16-2M9PLA
XLG-16H0-2
XLG-16K-2M9//
XLG-16K-2M9BLA
XLG-16L-2
XLG-16L-2M9BA
XLG-16L-2M9BLA
XLG-16L-2M9BLB
XLG-16L-2M9NA
XLG-16M-2M9BLB
XLG-25-2
XLG-25-2A93A
XLG-25-2M9//
XLG-25-2M9//-XA
XLG-25-2M9BA
XLG-25-2M9BC
XLG-25-2M9BLA
XLG-25-2M9BLA-XN1A
XLG-25-2M9BLB
XLG-25-2M9BZA
XLG-25-2M9BZB
XLG-25-2M9NA
XLG-25-2M9NC
XLG-25-2M9NLA
XLG-25-2M9NLB
XLG-25-2M9NMA
XLG-25-2M9NZA
XLG-25-2M9PLA
XLG-25H0-2M9NJLA
XLG-25H0-2M9NJLB
XLG-25H5-2M9NJLA
XLG-25K-2
XLG-25K-2A93A
XLG-25K-2A93A-XN1A
XLG-25K-2A93A-XP1A
XLG-25K-2A93A-XP1B
XLG-25K-2A93A-XQ1A
XLG-25K-2A93A-XQ1C
XLG-25K-2A93A-XQ1E
XLG-25K-2A93A-XR1A
XLG-25K-2A93A-XR2A
XLG-25K-2A93A-XR3A
XLG-25K-2M9BA
XLG-25K-2M9BLA
XLG-25K-2M9BLB
XLG-25KH0-2
XLG-25KH0-2M9NJLA
XLG-25L-2
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

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1 Piece(s) Quote KF16Flange side5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF16Flange side5 to 60No auto-switch (no magnet)No auto switchEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF16Flange side5 to 60No auto-switch (no magnet)No auto switchEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2-None

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1 Piece(s) Quote KF16Flange side5 to 60No auto-switch (no magnet)No auto switchEPDM 2101-80Internal: 1.3 × -10, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialExternal seal-None

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1 Piece(s) Quote KF16Flange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF16Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF16Flange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

SGD 886.32

1 Piece(s) Quote KF16Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF16Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF16Flange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange side5 to 60M9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange side5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF16Flange surface, left5 to 60No auto-switch (with magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF16Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange surface, back5 to 60-No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF16Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF16Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange surface, back5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF16Flange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF16Flange surface, right5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

SGD 801.97

1 Piece(s) Quote KF25Flange side5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF25Flange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange side5 to 60No auto-switch (with magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF25Flange side5 to 60No auto-switch (with magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

SGD 917.47

1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 60M9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone1None

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1 Piece(s) Quote KF25Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF25Flange side5 to 60M9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 150D-M9NJL2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 150D-M9NJL1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange side5 to 150D-M9NJL2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3With heater for 120℃

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1 Piece(s) Quote KF25Flange surface, left5 to 60-No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF25Flange surface, left5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 20.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedKalrez 4079Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Kalrez (Compound No.: 4079)Internal: 1.3 × 10^-10 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialExternal seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Kalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 20.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Chemraz (Compound No.: SS592)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Chemraz (Compound No.: SS630)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)Chemraz (Compound No.: SSE38)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF25Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange surface, left5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange surface, left5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF25Flange surface, left5 to 150M9NJWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF25Flange surface, back5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Elastic Seal

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