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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (Part Numbers)

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

(i)Caution

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications

XLD Series external appearance

XLD Series operating port direction

Model		XLD-25	XLD-40	XLD-50	XLD-63	XLD-80
Valve Type		Always closed (spring return and seal) (both main and initial exhaust valves)
Fluids		Inert gas vacuum
Operating Temperature (°C)	XLD	5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}	Main Exhaust Valve	14	45	80	160	200
Conductance L/s ^{Note 1:}	Initial Exhaust Valve	0.5 to 3	2 to 8	2.5 to 11	4 to 18	4 to 18
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Flange Type		KF (NW)			KF (NW) / K (DN)
Main Material ^{Note 3:}		Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface Treatment		External: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)		0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port Diameter	XLD	M5	Rc 1/8
Weight (kg)	XLD	0.5	1.2	1.8	3.4	5.6

Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

XLD air-operated type dimensional drawing

(Unit: mm)

Model	A	B	C	D	E	Fn	Fd	G	H	J	K
XLD-25	50	123	48	1	12	40	-	26	41	16	7.5
XLD-40	65	170	66	2	11	55	-	41	63	20	15
XLD-50	70	183	79	2	11	75	-	52	68	20	17.5
XLD-63	88	217	100	3	11	87	95	70	72	20	20
XLD-80	90	256	117	3	11	114	110	83	98	20	26.5

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLD Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

Initial exhaust valve conductance settings graph

1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise.
2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)

""A" Section Thread Tightening Torque

XLD-25/XLD-40/XLD-50: 0.08 N·m (0.8 kgf·cm) or less
XLD-63/XLD-80: 0.3 N·m (3 kgf·cm) or less

Product Options Descriptions

Auto switch (for main exhaust valve)
The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C).
Heater
Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.

Notes

*The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*The temperature of the switch part on the auto switch must be no higher than 60°C.
*When using with heaters (thermistors), install a device for preventing overheating.
*Refer to the manufacturer's catalog for parts other than those detailed above.

: 30; 60; 90

Part Number
XLD-63DL
XLD-63DL-M9//
XLD-63DM
XLD-63H0
XLD-63H5
XLD-63L
XLD-63L-A93A
XLD-63L-M9//
XLD-63L-M9//-XS1A
XLD-63L-M9BA
XLD-63L-M9BA-XS1A
XLD-63L-M9NA
XLD-63L-M9PA
XLD-63M
XLD-63M-M9BA
XLD-63MH0
XLD-80
XLD-80-A93A
XLD-80-M9//
XLD-80-M9BA
XLD-80-M9BB
XLD-80-M9BC
XLD-80-M9NA
XLD-80-M9NB
XLD-80-M9NC
XLD-80-M9NLA
XLD-80-M9PLA
XLD-80D
XLD-80D-A93A
XLD-80D-M9//
XLD-80D-M9BA
XLD-80D-M9NA
XLD-80DLH0
XLD-80DLH5
XLD-80H0
XLD-80H4
XLD-80H5
XLD-80K-M9BA
XLD-80K-M9PB
XLD-80L
XLD-80L-M9BA
XLD-80L-M9BA-XS1A
XLD-80L-M9NA
XLD-80L-M9NC
XLD-80LH0
XLD-80LH4
XLD-80LH5
XLD-80M
XLD-80M-M9NA

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Sonic Speed Conductance	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Body Surface Treatment	Seal Change Location	Length of Lead Wire for Switch (m)	Heater Yes/No
SGD 2,618.00	1 Piece(s)	Quote	K	63	160L/S	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	160L/S	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	160L/S	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
SGD 2,670.50	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 2,628.50	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-	None
SGD 2,704.57	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal / external seal / S valve seal assembly / O-ring for fixing	0.5	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, back	5 to 60	D-M9P solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, right	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	160L/S	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
SGD 3,605.23	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
SGD 3,566.27	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 3,617.02	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 3,557.28	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 60	D-M9P solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange side	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange side	5 to 60	No auto-switch (with built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	200L/S	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 100°C
-	1 Piece(s)	Quote	KF	80	200L/S	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, left	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, left	5 to 60	D-M9P solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	External: hard anodized aluminum, Internal: base material	Valve seal / external seal / S valve seal assembly / O-ring for fixing	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 100°C
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No switch	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	200L/S	Flange surface, right	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11	External: hard anodized aluminum, Internal: base material	None	0.5	None

Basic Information

Type	Air-Actuated Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Configure

229 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- K
Clear
Flange Nominal
- 25
- 40
- 50
- 63
- 80
Clear
Sonic Speed Conductance
14L/S

45L/S

80L/S

160L/S

200L/S
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9P solid-state auto switch

M9B

M9N

M9P

A90

D-A90 reed auto switch

A93

D-A93 reed auto switch

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)

Without auto switch (no built-in magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS592)

Chemraz (Compound No.: SS630)

VMQ 1232-70

VMQ (Formula No.: 1232-70)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM (Formula No.: 2101-80)

FKM for Plasma (Formula No.: 3310-75)

Kalrez (Compound No.: 4079)

ULTIC ARMOR (Compound No.: UA4640)
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 external: 1.3 × 10^-9
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
Clear
Seal Change Location
External seal

None

Valve seal / external seal / S valve seal assembly / O-ring for fixing
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
Clear
type
- XLD
- XLD-25
- XLD-40
- XLD-50
- XLD-63
- XLD-80
Clear
CAD
- 2D
- 3D
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (Part Numbers)

(i)Caution

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications

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Product Diagram

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Specification/Dimensions

Flange Type

Flange Nominal

Sonic Speed Conductance

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

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Amount of leakage(Pa·m³/s)