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A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Part Number
Configured Part Number is shown.
XMD-40CL-M9BA
Angle valve XMD Series external appearance
Angle valve XMD series pilot port direction
In-line type XYD series external appearance
In-line type XYD series pilot port direction
Model | XMD-25 XYD-25 | XMD-40 XYD-40 | XMD-50 XYD-50 | XMD-63 XYD-63 | XMD-80 XYD-80 | |
---|---|---|---|---|---|---|
Flange (Valve) Size | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
Valve Type | Always closed (pressurize to open and spring seal) (both main and initial exhaust valves) | |||||
Fluids | Inert gas vacuum | |||||
Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | |||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
Conductance L/s Note 1 | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
Operating Time (s) | Main Exhaust Valve | 0.10 | 0.21 | 0.24 | 0.26 | 0.28 |
Initial Exhaust Valve | 0.70 | 0.08 | 0.09 | 0.23 | 0.27 | |
Flange Type | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
Main Material Note 3 | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | |||||
Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
Pilot Port Connection Port Diameter | M5 | Rc 1/8 | ||||
Weight kg Note 2 | XMD | 0.65 | 1.50 (1.86) | 2.20 | 4.10 (5.46) | 6.80 |
XYD | 0.71 | 1.52 | 2.60 | 4.80 | 8.30 |
Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
(Unit: mm)
XMD angle type dimensional drawing
XYD in-line type dimensional drawing
Model | A | B | C | D | Fn | Fd | Fc | G | H | J | K | P.C.D. L1 | L2 |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
XMD-25 | 50 | 123 | 48 | 1 | 40 | - | - | 26 | 41 | 16 | 7.5 | - | - |
XMD-40 | 65 | 170 | 66 | 2 | 55 | - | 70 | 41 | 63 | 20 | 15 | P.C.D 58.7 | 6 × ø6.6 mm |
XMD-50 | 70 | 183 | 79 | 2 | 75 | - | - | 52 | 68 | 20 | 17.5 | - | - |
XMD-63 | 88 | 217 | 100 | 3 | 87 | 95 | 114 | 70 | 72 | 20 | 19.5 | P.C.D 92.1 | 8 × ø8.4 mm |
XMD-80 | 90 | 256 | 117 | 3 | 114 | 110 | - | 83 | 98 | 20 | 26.5 | - | - |
Model | A | B | C | D | E | Fn | Fd | G | H | J | K |
---|---|---|---|---|---|---|---|---|---|---|---|
XYD-25 | 100.2 | 86.7 | 48 | 1 | 23.5 | 40 | - | 26 | 66 | 16 | 7.5 |
XYD-40 | 130 | 114 | 66 | 2 | 38 | 55 | - | 41 | 84 | 20 | 15 |
XYD-50 | 178 | 128 | 79 | 2 | 53 | 75 | - | 52 | 95 | 20 | 17.5 |
XYD-63 | 209 | 163 | 100 | 3 | 61 | 87 | 95 | 70 | 121 | 20 | 19.5 |
XYD-80 | 268 | 193 | 117 | 3 | 80 | 114 | 110 | 83 | 144 | 20 | 26.5 |
XMD angle type diagram
XYD in-line type diagram
*Refer to p. 497 of the manufacturer's catalog for maintenance parts.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance
Part Number |
---|
XMD-40CL-M9BA |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 |
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Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XMD-40CL-M9BA in the Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD series.
Part Number |
---|
XMD-25-A90LA-XT1A |
XMD-25-A93A |
XMD-25-A93LC |
XMD-40CL-M9NA |
XMD-40CL-M9NA-XN1A |
XMD-40CL-M9NLA |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 3 | ||
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 |
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