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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD (XMD-63-M9//)
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XMD-63-M9//
Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications
Angle valve XMD Series external appearance
Angle valve XMD series pilot port direction
In-line type XYD series external appearance
In-line type XYD series pilot port direction
| Model | XMD-25 XYD-25 | XMD-40 XYD-40 | XMD-50 XYD-50 | XMD-63 XYD-63 | XMD-80 XYD-80 | |
|---|---|---|---|---|---|---|
| Flange (Valve) Size | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
| Valve Type | Always closed (pressurize to open and spring seal) (both main and initial exhaust valves) | |||||
| Fluids | Inert gas vacuum | |||||
| Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | |||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
| Conductance L/s Note 1 | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
| Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
| Operating Time (s) | Main Exhaust Valve | 0.10 | 0.21 | 0.24 | 0.26 | 0.28 |
| Initial Exhaust Valve | 0.70 | 0.08 | 0.09 | 0.23 | 0.27 | |
| Flange Type | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
| Main Material Note 3 | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | |||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
| Pilot Port Connection Port Diameter | M5 | Rc 1/8 | ||||
| Weight kg Note 2 | XMD | 0.65 | 1.50 (1.86) | 2.20 | 4.10 (5.46) | 6.80 |
| XYD | 0.71 | 1.52 | 2.60 | 4.80 | 8.30 | |
Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
Product Drawing
(Unit: mm)
XMD angle type dimensional drawing
XYD in-line type dimensional drawing
| Model | A | B | C | D | Fn | Fd | Fc | G | H | J | K | P.C.D. L1 | L2 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| XMD-25 | 50 | 123 | 48 | 1 | 40 | - | - | 26 | 41 | 16 | 7.5 | - | - |
| XMD-40 | 65 | 170 | 66 | 2 | 55 | - | 70 | 41 | 63 | 20 | 15 | P.C.D 58.7 | 6 × ø6.6 mm |
| XMD-50 | 70 | 183 | 79 | 2 | 75 | - | - | 52 | 68 | 20 | 17.5 | - | - |
| XMD-63 | 88 | 217 | 100 | 3 | 87 | 95 | 114 | 70 | 72 | 20 | 19.5 | P.C.D 92.1 | 8 × ø8.4 mm |
| XMD-80 | 90 | 256 | 117 | 3 | 114 | 110 | - | 83 | 98 | 20 | 26.5 | - | - |
| Model | A | B | C | D | E | Fn | Fd | G | H | J | K |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XYD-25 | 100.2 | 86.7 | 48 | 1 | 23.5 | 40 | - | 26 | 66 | 16 | 7.5 |
| XYD-40 | 130 | 114 | 66 | 2 | 38 | 55 | - | 41 | 84 | 20 | 15 |
| XYD-50 | 178 | 128 | 79 | 2 | 53 | 75 | - | 52 | 95 | 20 | 17.5 |
| XYD-63 | 209 | 163 | 100 | 3 | 61 | 87 | 95 | 70 | 121 | 20 | 19.5 |
| XYD-80 | 268 | 193 | 117 | 3 | 80 | 114 | 110 | 83 | 144 | 20 | 26.5 |
Product Diagram
XMD angle type diagram
XYD in-line type diagram
*Refer to p. 497 of the manufacturer's catalog for maintenance parts.
Product Working Principle
- 1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance. - 2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount. - 3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully. - 4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance
Notes
- *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *The temperature of the switch part must be no higher than 60°C.
- *Refer to the manufacturer's catalog for product information not detailed above.
| Part Number |
|---|
| XMD-63-M9// |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - |
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Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XMD-63-M9// in the Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD series.
Specification/Dimensions
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
type
- XMD
- XYD
-
Flange Type
- KF
- K
- CF
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Sonic Speed Conductance
-
Valve Type
- Angle type
- In-line type
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Seal Change Location
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 32 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Similar Part Numbers
| Part Number |
|---|
| XMD-25-A90LA-XT1A |
| XMD-25-A93A |
| XMD-25-A93LC |
| XMD-63-M9BA |
| XMD-63-M9NA |
| XMD-63-XS1A |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 3 | ||
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | - |
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