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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD (XMD-63C-M9NLC)

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD XMD-63C-M9NLC

SMC

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XMD-63C-M9NLC

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series external appearance

In-line type XYD series pilot port direction

In-line type XYD series pilot port direction

ModelXMD-25
XYD-25		XMD-40
XYD-40		XMD-50
XYD-50		XMD-63
XYD-63		XMD-80
XYD-80
Flange (Valve) Size2540, CF0705063, CF11480
Valve TypeAlways closed (pressurize to open and spring seal) (both main and initial exhaust valves)
FluidsInert gas vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Operating Time (s)Main Exhaust Valve0.100.210.240.260.28
Initial Exhaust Valve0.700.080.090.230.27
Flange TypeKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Main Material Note 3Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port DiameterM5Rc 1/8 
Weight kg Note 2XMD0.651.50 (1.86)2.204.10 (5.46)6.80
XYD0.711.522.604.808.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

 

(Unit: mm)

 

XMD angle type dimensional drawing

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

XYD in-line type dimensional drawing

ModelABCDFnFdFcGHJKP.C.D. L1L2
XMD-255012348140--2641167.5--
XMD-406517066255-7041632015P.C.D 58.76 × ø6.6 mm
XMD-507018379275--52682017.5--
XMD-63882171003879511470722019.5P.C.D 92.18 × ø8.4 mm
XMD-80902561173114110-83982026.5--
ModelABCDEFnFdGHJK
XYD-25100.286.748123.540-2666167.5
XYD-401301146623855-41842015
XYD-501781287925375-52952017.5
XYD-632091631003618795701212019.5
XYD-80268193117380114110831442026.5

Product Diagram

XMD angle type diagram

XMD angle type diagram

XYD in-line type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

  • *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part must be no higher than 60°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.
30
45
60
  1. 1
Part Number
XMD-63C-M9NLC
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Valve Type Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote CF63160L/SAngle typeFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

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  1. 1
 

Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XMD-63C-M9NLC in the Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD series.

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Specification/Dimensions

  • type

    • XMD
    • XYD

    Clear

  • Flange Type

    • KF
    • K
    • CF

    Clear

  • Flange Nominal

    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Sonic Speed Conductance

    • 14L/S
    • 45L/S
    • 80L/S
    • 160L/S
    • 200L/S

    Clear

  • Valve Type

    • Angle type
    • In-line type

    Clear

  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N solid-state auto switch
    • D-M9P solid-state auto switch
    • M9B
    • M9N
    • M9P
    • A90
    • D-A90 reed auto switch
    • A93
    • D-A93 reed auto switch
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. valve closed
    • 1 pc. valve open
    • 2 pcs. valve open/closed
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch
    • No switch

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Chemraz SSE38
    • Barrel Perfluoro 70W
    • Chemraz SS592
    • VMQ 1232-70
    • VMQ (Formula No.: 1232-70)
    • FKM 1349-80
    • FKM (Formula No.: 1349-80)
    • EPDM 2101-80
    • EPDM (Formula No.: 2101-80)
    • FKM for Plasma 3310-75
    • Kalrez 4079

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-10, External: 1.3 × 10-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

    Clear

  • Seal Change Location

    • External seal
    • None
    • Valve seal / S valve seal assembly / O-ring for fixing
    • Valve seal / external seal / S valve seal assembly / O-ring for fixing

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 32 Day(s) or Less

    Clear

Specify Alterations

Similar Part Numbers

Part Number
XMD-25-A90LA-XT1A
XMD-25-A93A
XMD-25-A93LC
XMD-63CL
XMD-63CL-M9NLA
XMD-63D
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Valve Type Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF2514L/SAngle typeFlange side5 to 60D-A90 reed auto switch2 pcs. valve open/closedFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing3

-

1 Piece(s) Quote KF2514L/SAngle typeFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF2514L/SAngle typeFlange side5 to 60D-A93 reed auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote CF63160L/SAngle typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote CF63160L/SAngle typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote K63160L/SAngle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

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