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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

SMC

SMC

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Part Number

Configured Part Number is shown.

 
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Part Number
20-MSQA10A-A93L
20-MSQA10A-M9NL
20-MSQA10R
20-MSQA10R-M9B
20-MSQA10R-M9BL
20-MSQA10R-M9BVL
20-MSQA10R-M9BVLS
20-MSQA10R-M9BVZ
20-MSQA10R-M9BZ
20-MSQA10R-M9NL
20-MSQA20A
20-MSQA20A-M9B
20-MSQA20A-M9BL
20-MSQA20A-M9BVL
20-MSQA20A-M9BWL
20-MSQA20A-M9BZ
20-MSQA20R-M9BL
20-MSQA20R-M9BWL
20-MSQA30A-M9BL
20-MSQA30R
20-MSQA30R-M9BL
20-MSQA50A
20-MSQA50R
20-MSQA50R-M9B
20-MSQA50R-M9BL
20-MSQA50R-M9BWL
20-MSQA50R-M9NL
20-MSQB10A
20-MSQB10A-A93
20-MSQB10A-A93L
20-MSQB10A-M9BL
20-MSQB10A-M9BVL
20-MSQB10A-M9BWL
20-MSQB10A-M9BWVL
20-MSQB10A-M9N
20-MSQB10A-M9NL
20-MSQB10R
20-MSQB10R-A93
20-MSQB10R-A93L
20-MSQB10R-M9B
20-MSQB10R-M9BL
20-MSQB10R-M9BVL
20-MSQB10R-M9BWL
20-MSQB10R-M9NL
20-MSQB20A
20-MSQB20A-M9B
20-MSQB20A-M9BL
20-MSQB20A-M9BVL
20-MSQB20A-M9BW
20-MSQB20A-M9NL
20-MSQB20R
20-MSQB20R-A93
20-MSQB20R-A93L
20-MSQB20R-M9B
20-MSQB20R-M9BL
20-MSQB20R-M9BW
20-MSQB20R-M9BWL
20-MSQB20R-M9N
20-MSQB20R-M9NL
20-MSQB30A
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipEnvironment, Applications Rigidity, Accuracy Tube Nominal Dia. Allowable Kinetic Energy
(J) 		Allowable Kinetic Energy
(J) 		Format Size Connection port location Switch Lead wire
(m) 		Number of switches Port types Connector type Type

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA9332 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BV31 pc.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BV52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BW32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9BW32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedM9B0.52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedM9BW32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)High Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedM9N32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA930.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA9332 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BW32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BWV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedA930.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedA9332 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BW32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BV32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BW0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedA930.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedA9332 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9B0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9B32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9BW0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9BW32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9N0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.1 to Less Than 10.116With shock absorber20Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

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Basic Information

Type Rotary Table 2-point Stop Main Body Shape Block Shape Oscillation Angle A 190°
Operation Method Double Rack Valves N/A

Configure

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160 Part Numbers

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Specification/Dimensions

  • Rigidity, Accuracy

    • Standard
    • High Rigidity, High Accuracy

    Clear

  • Tube Nominal Dia.

    • ø6
    • ø8
    • Φ8
    • ø10
    • ø12
    • ø15
    • ø18
    • ø21
    • Φ21
    • ø25
    • ø28
    • ø32
    • ø40

    Clear

  • Allowable Kinetic Energy(J)

    • Less than 0.005
    • 0.005 to Less Than 0.01
    • 0.01 to Less Than 0.1
    • 0.1 to Less Than 1
    • 1 ~ Less than 50

    Clear

  • Allowable Kinetic Energy(J)

    • 0.001
    • 0.0015
    • 0.002
    • 0.006
    • 0.007
    • 0.025
    • 0.039
    • 0.048
    • 0.081
    • 0.116
    • 0.240
    • 0.294
    • 0.320
    • 0.560
    • 1.100
    • 1.600
    • 2.9

    Clear

  • Format

    • Includes adjusting bolt
    • With shock absorber

    Clear

  • Size

    • 1
    • 2
    • 3
    • 7
    • 10
    • 20
    • 30
    • 50
    • 70
    • 100
    • 200

    Clear

  • Connection port location

    • Front ported
    • Side ported

    Clear

  • Switch

    • F8B
    • F8N
    • F8P
    • M9B
    • M9BA
    • M9BAV
    • M9BV
    • M9BW
    • M9BWV
    • M9N
    • M9NA
    • M9NAV
    • M9NV
    • M9NW
    • M9NWV
    • M9P
    • M9PA
    • M9PV
    • M9PW
    • M9PWV
    • A90
    • A90V
    • A93
    • A93V
    • A96
    • A96V
    • Without auto switch (built-in magnet)

    Clear

  • Lead wire(m)

    • 0.5
    • 1
    • 3
    • 5
    • None

    Clear

  • Number of switches

    • 1 pc.
    • 2 pcs.
    • 3 pcs.
    • 4 pcs.
    • None

    Clear

  • Port types

    • NPT 1/8
    • Rc 1/8
    • M3
    • M5

    Clear

  • Connector type

    • M12 4-pin
    • None

    Clear

  • Type

    • Clean Series (Vacuum type)
    • Copper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)
    • Copper and Fluorine Unavailable Specifications

    Clear

  • type

    • 11-MSQA
    • 11-MSQB
    • 20-MSQA
    • 20-MSQB
    • 22-MSQA
    • 22-MSQB

    Clear

  • Environment, Applications

    • Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)
    • Cleanroom

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 32 Day(s) or Less

    Clear

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