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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series (Part Numbers)

Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

SMC

SMC

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Part Number

Configured Part Number is shown.

 
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Part Number
20-MSQB200R
20-MSQB200R-M9B
20-MSQB200R-M9BL
20-MSQB200R-M9BWZ
22-MSQA10A
22-MSQA10A-M9BW
22-MSQA10R
22-MSQA20A
22-MSQA20R
22-MSQA20R-M9B
22-MSQA20R-M9BWL
22-MSQA20R-M9PZS
22-MSQA30R
22-MSQA50R-M9NZ
22-MSQB10A
22-MSQB10A-M9N
22-MSQB10R
22-MSQB10R-A90
22-MSQB10R-M9B
22-MSQB10R-M9N
22-MSQB20A
22-MSQB20A-A93VL
22-MSQB20A-M9B
22-MSQB20A-M9BL
22-MSQB20A-M9BWL
22-MSQB20R
22-MSQB20R-M9B
22-MSQB20R-M9BL
22-MSQB30A
22-MSQB30A-A90
22-MSQB30A-M9BL
22-MSQB30R
22-MSQB30R-A90
22-MSQB30R-A90L
22-MSQB30R-M9B
22-MSQB30R-M9BL
22-MSQB30R-M9N
22-MSQB50A
22-MSQB50R
22-MSQB50R-M9B
22-MSQB50R-M9BL
22-MSQB50R-M9BM
22-MSQB50R-M9BVM
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipEnvironment, Applications Rigidity, Accuracy Tube Nominal Dia. Allowable Kinetic Energy
(J) 		Allowable Kinetic Energy
(J) 		Format Size Connection port location Switch Lead wire
(m) 		Number of switches Port types Connector type Type

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø401 ~ Less than 502.9With shock absorber200Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø401 ~ Less than 502.9With shock absorber200Side portedM9B0.52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø401 ~ Less than 502.9With shock absorber200Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø401 ~ Less than 502.9With shock absorber200Side portedM9BW52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BW0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,526.47

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9BW32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9P51 pc.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,710.21

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø250.1 to Less Than 10.294With shock absorber50Side portedM9N52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 843.73

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,058.98

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,096.08

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedA900.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,164.22

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9N0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA93V32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BW32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9B32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B32 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedA900.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedA9032 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedM9B0.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedM9B32 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedM9N0.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

SGD 1,157.45

1 Piece(s) 32 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedM9B0.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedM9B32 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedM9B12 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) Quote Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedM9BV12 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

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Basic Information

Type Rotary Table 2-point Stop Main Body Shape Block Shape Oscillation Angle A 190°
Operation Method Double Rack Valves N/A

Configure

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583 Part Numbers

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Specification/Dimensions

  • Environment, Applications

    • Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)
    • Cleanroom

    Clear

  • Rigidity, Accuracy

    • Standard
    • High Rigidity, High Accuracy

    Clear

  • Tube Nominal Dia.

    • ø6
    • ø8
    • Φ8
    • ø10
    • ø12
    • ø15
    • ø18
    • ø21
    • Φ21
    • ø25
    • ø28
    • ø32
    • ø40

    Clear

  • Allowable Kinetic Energy(J)

    • Less than 0.005
    • 0.005 to Less Than 0.01
    • 0.01 to Less Than 0.1
    • 0.1 to Less Than 1
    • 1 ~ Less than 50

    Clear

  • Allowable Kinetic Energy(J)

    • 0.001
    • 0.0015
    • 0.002
    • 0.006
    • 0.007
    • 0.025
    • 0.039
    • 0.048
    • 0.081
    • 0.116
    • 0.240
    • 0.294
    • 0.320
    • 0.560
    • 1.100
    • 1.600
    • 2.9

    Clear

  • Format

    • Includes adjusting bolt
    • With shock absorber

    Clear

  • Size

    • 1
    • 2
    • 3
    • 7
    • 10
    • 20
    • 30
    • 50
    • 70
    • 100
    • 200

    Clear

  • Connection port location

    • Front ported
    • Side ported

    Clear

  • Switch

    • F8B
    • F8N
    • F8P
    • M9B
    • M9BA
    • M9BAV
    • M9BV
    • M9BW
    • M9BWV
    • M9N
    • M9NA
    • M9NAV
    • M9NV
    • M9NW
    • M9NWV
    • M9P
    • M9PA
    • M9PV
    • M9PW
    • M9PWV
    • A90
    • A90V
    • A93
    • A93V
    • A96
    • A96V
    • Without auto switch (built-in magnet)

    Clear

  • Lead wire(m)

    • 0.5
    • 1
    • 3
    • 5
    • None

    Clear

  • Number of switches

    • 1 pc.
    • 2 pcs.
    • 3 pcs.
    • 4 pcs.
    • None

    Clear

  • Port types

    • NPT 1/8
    • Rc 1/8
    • M3
    • M5

    Clear

  • Connector type

    • M12 4-pin
    • None

    Clear

  • Type

    • Clean Series (Vacuum type)
    • Copper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)
    • Copper and Fluorine Unavailable Specifications

    Clear

  • type

    • 11-MSQA
    • 11-MSQB
    • 20-MSQA
    • 20-MSQB
    • 22-MSQA
    • 22-MSQB

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 32 Day(s) or Less

    Clear

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