SMC Vacuum Valves

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  Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

  SMC

  A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
  [Features]
  ・ Flame-retardant (UL94 V-0 compliant)
  ・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
  ・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
  ・ Securely seals with a large spring force
  ・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
  ・ Operating temperature range: 5 to 60℃

  CAD ：

  2D / 3D

  Days to Ship:	32 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  ・ Achieves system compactness and piping savings
  ・ Prevents dust from rolling up in the chamber when exhausting
  ・ Adjustable initial exhaust valve flow rate
  ・ Air operated type / with solenoid valve
  ・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
  ・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
  ・ Strong against fluorine
  · Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
  · Lightweight and compact

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series

  SMC

  Vacuum regulator with low outgassing.
  [Features]
  · Aluminum body.
  · Replaceable bellows.
  · Uniform baking temperature.
  · Lightweight and compact.
  · Little heavy metal contamination.

  CAD ：

  2D / 3D

  Days to Ship:	5 Day(s) or more

• 

  Vacuum Assist Valve ZP2V Series

  SMC

  A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
  [Features]
  · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
  · Protects against drops in vacuum pressure, even when some pads are not suctioning.
  · Single-action fitting models now also available.
  · No need for switching the operation when changing out workpieces.
  · Allows the simplification of control circuits when workpieces have different shapes.
  · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

  CAD ：

  2D / 3D

  Days to Ship:	32 Day(s) or more

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  Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

  SMC

  A vacuum valve with a pressure balanced structure.
  [Features]
  · Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · Interchangeable with XL Series aluminum high-vacuum angle valves.
  · Bellows type is particulate-free and cleaned.

  CAD ：

  2D / 3D

  Days to Ship:	22 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	61 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Air-operated type with solenoid valve.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

  SMC

  A vacuum valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	32 Day(s) or more

• 

  Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V

  SMC

  A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
  [Features]
  · An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
  · Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
  · Valve type: Normally closed (pressurize to open, spring seal).
  Fluids: Nitrogen, air, inert gas.
  · Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
  · Weight: 0.5 kg.

  CAD ：

  2D / 3D

  Standard Price:	SGD 1,334.20-
  Days to Ship:	32 Day(s)

• 

  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

  SMC

  A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
  [Features]
  · Uses no sliding metal parts, minimizing particulate matter.
  · The pressure balance mechanism allows an unrestricted exhaust direction.
  · A control power supply circuit for solenoid valve drive is now standard.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	41 Day(s) or more

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series

  SMC

  A vacuum regulator with little heavy metal contamination.
  [Features]
  · Aluminum body.
  · Replaceable bellows.
  · Uniform baking temperature.
  · Lightweight and compact.
  · Low outgassing.

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	Quote

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Pressure balanced structure.
  · Body material: SCS13 (SUS304 equivalent).
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	32 Day(s) or more

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	32 Day(s) or more

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