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SMC Vacuum Valves（Driving Type：Directly Operated）

4 items

: 30; 45; 60

Days to Ship	All 4 Day(s) or Less 5 Day(s) or Less 6 Day(s) or Less 7 Day(s) or Less 8 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 13 Day(s) or Less 14 Day(s) or Less

Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

SMC

A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

SMC

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: 41 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: Quote

Days to Ship:	32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	41 Day(s) or more

Days to Ship:	Quote


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	SMC
Product Series	Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Days to Ship	32 Day(s) or more	Quote	41 Day(s) or more	Quote
Type	High Vacuum Solenoid	High Vacuum Solenoid	Solenoid Valve	High Vacuum Solenoid
Application	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve
Solenoid Type	Single	Single	Single	Single
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed
Driving Type	Directly Operated	Directly Operated	Directly Operated	Directly Operated
Effective Sectional Area(mm2)	-	-	-	-
Pipe Port Type	Rc / NPT / Face Seal Fitting / Compression Fitting	Flange	Flange	Flange
Plumbing Thread Nominal	1/8 / 1/4 / 3/8	-	-	-
Connecting Tube Diameter	-	-	-	-
Flange Type	-	KF / K	KF	KF / K
Flange Nominal	-	25 / 40 / 50 / 63 / 80	16 / 25	16 / 25 / 40 / 50 / 63 / 80
CV Value	-	-	-	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
Clear