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Vacuum Valves（Pipe Port Type：Flange）

Vacuum valves are a type of valve attached to vacuum chambers. Vacuum valves must block gas components almost completely or must be precisely controlled compared with regular valves.
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.

22 items

: 30; 45; 60

Days to Ship	All 4 Day(s) or Less 5 Day(s) or Less 6 Day(s) or Less 7 Day(s) or Less 8 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 13 Day(s) or Less 14 Day(s) or Less

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: 61 Day(s) or more
Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

CAD ：

2D / 3D

Days to Ship: 22 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series

SMC

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

CAD ：

2D / 3D

Days to Ship: 5 Day(s) or more
Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series

SMC

A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.

CAD ：

2D / 3D

Days to Ship: Quote

Days to Ship:	Quote

Days to Ship:	61 Day(s) or more

Days to Ship:	22 Day(s) or more

Days to Ship:	5 Day(s) or more

Days to Ship:	32 Day(s) or more

Days to Ship:	Quote

Stainless Steel Valve, NW Flange Ball Valve for Vacuum

CONSUSS

If the need is for the MISUMI lowest cost vacuum valve, use CONSUSS.
This offers a vacuum valve with high quality and low cost.

Standard Price:	SGD 255.89-
Days to Ship:	4 Day(s) or more

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: Quote
Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	Quote

Days to Ship:	Quote

Days to Ship:	32 Day(s) or more

High Vacuum Angle Valve (Manual Type)

IRIE KOKEN

Manual type angle valve with high corrosion resistance by using stainless steel for the entire part.
[Features]
·Since the vacuum valve can be opened and closed manually, it can be opened slowly.
·Compact design for the entire part, having achieved compactness and weight reduction.
·Both positive pressure and back pressure do not leak even with a differential pressure of 0.15 MPa.
·Free mounting posture (unless otherwise specified, the mounting posture is recommended with the valve seat facing the one with the larger pressure fluctuation).
·Greater conductance can be obtained by functional design.
·Easy to install due to one-sided rotating flange (CF flange).
[Applications]
·It can be used for manually operated devices such as general-purpose testing machines.

Standard Price:	SGD 477.11-
Days to Ship:	4 Day(s) or more

Butterfly Valve/AXOII Series

FUJITECHNOLOGY

It has a 2-year warranty for 1,000,000 open and close.

Standard Price:	SGD 1,262.25-
Days to Ship:	18 Day(s) or more

Motor-Driven Butterfly Valve MBV-LDⅡ-MP Series

FUJITECHNOLOGY

It has a 2-year warranty for 1,000,000 open/close, it has multi-position, and it can be used as APC.

Standard Price:	SGD 3,942.17-
Days to Ship:	18 Day(s) or more

Automatic Butterfly Valve/BV-NII Series

FUJITECHNOLOGY

It can be operated with the degree of opening at 2 different positions, 0 to 45° and 90°.

Standard Price:	SGD 1,672.48
Days to Ship:	18 Day(s) or more

Manual Lever Handle Type Butterfly Valve AX Series

FUJITECHNOLOGY

It has a 2-year warranty for 1,000,000 open and close, and it has opening display and lock mechanism.

Standard Price:	SGD 1,104.47-
Days to Ship:	18 Day(s) or more

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

SMC

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: 41 Day(s) or more
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	Quote

Days to Ship:	41 Day(s) or more

Days to Ship:	32 Day(s) or more

High-Vacuum Angle Valve (Multi-Action / Single-Action)

IRIE KOKEN

[Features]
· The vacuum side valve material is completely made up of stainless steel (SUS).
· The entire unit is made small and lightweight by the compact design.
· There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
· Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
· The functional design results in large conductance.
· It has a single-side rotating flange, so installation is easy (ConFlat flange).

Standard Price:	SGD 507.75-
Days to Ship:	4 Day(s) or more

Manual Slot Butterfly Valve AX Series

FUJITECHNOLOGY

It has a 2-year warranty for 1,000,000 open and close, and it has opening display and lock mechanism.

Standard Price:	SGD 1,262.25-
Days to Ship:	18 Day(s) or more


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	SMC	SMC	SMC	CONSUSS	SMC	SMC	SMC	SMC	IRIE KOKEN	FUJITECHNOLOGY	FUJITECHNOLOGY	FUJITECHNOLOGY	FUJITECHNOLOGY	SMC	SMC	SMC	SMC	IRIE KOKEN	FUJITECHNOLOGY
Product Series	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series	Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series	Stainless Steel Valve, NW Flange Ball Valve for Vacuum	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD	High Vacuum Angle Valve (Manual Type)	Butterfly Valve/AXOII Series	Motor-Driven Butterfly Valve MBV-LDⅡ-MP Series	Automatic Butterfly Valve/BV-NII Series	Manual Lever Handle Type Butterfly Valve AX Series	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series	Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)	Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)	High-Vacuum Angle Valve (Multi-Action / Single-Action)	Manual Slot Butterfly Valve AX Series
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D		2D / 3D	2D / 3D	2D / 3D	2D / 3D						2D / 3D	2D / 3D	2D / 3D	2D / 3D
Days to Ship	Quote	61 Day(s) or more	22 Day(s) or more	5 Day(s) or more	32 Day(s) or more	Quote	4 Day(s) or more	Quote	Quote	Quote	32 Day(s) or more	4 Day(s) or more	18 Day(s) or more	18 Day(s) or more	18 Day(s) or more	18 Day(s) or more	Quote	Quote	41 Day(s) or more	32 Day(s) or more	4 Day(s) or more	18 Day(s) or more
Type	Air-Actuated Vacuum Valve	Pilot Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Pilot Vacuum Valve	High Vacuum Solenoid	Manual Vacuum Valve	Pilot Vacuum Valve	High Vacuum Solenoid	Pilot Vacuum Valve	Pilot Vacuum Valve	Manual Vacuum Valve	Air-Actuated Vacuum Valve	Mechanically-Operated Vacuum Valve	Air-Actuated Vacuum Valve	Manual Vacuum Valve	High Vacuum Solenoid	Manual Vacuum Valve	Solenoid Valve	Manual Vacuum Valve	Air-Actuated Vacuum Valve	Manual Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	3-Port Valve	2-Port Valve	3-Port Valve	-	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	-	-	-	-	-	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	-
Solenoid Type	-	-	-	Single	-	Single	-	-	Single	-	-	-	-	-	-	-	Single	-	Single	-	-	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	-	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	-	Others	Others	Others	Others	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed / Others	Others
Driving Type	-	-	-	-	-	Air Pilot	-	-	Directly Operated	-	-	-	-	-	-	-	Directly Operated	-	Directly Operated	-	Directly Operated	-
Effective Sectional Area(mm2)	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-
Pipe Port Type	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange
Plumbing Thread Nominal	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-
Connecting Tube Diameter	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-
Flange Type	KF / K	KF / K	NW / Others	NW / Others	KF / K / CF / Others	NW / Others	NW	KF / K	KF / K	KF / K	KF / K / CF	NW	NW / JIS / ISO / Others	NW / JIS / ISO	ISO	NW / JIS	KF / K	KF	KF	KF / CF	NW	NW / JIS / ISO / Others
Flange Nominal	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	25 / 40 / 50	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50	80 / 100 / 150 / 32 / 65 / 52	80 / 100 / 150	32	80 / 100 / 150 / 32 / 65 / 52	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50	16 / 25	16 / 25 / 40 / 50	16 / 25 / 40 / 50	80 / 100 / 150 / 32 / 65 / 52
CV Value	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
Clear