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Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

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Vacuum Valves（Type：Air-Actuated Vacuum Valve）

Vacuum valves are a type of valve attached to vacuum chambers. Vacuum valves must block gas components almost completely or must be precisely controlled compared with regular valves.
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.

8 items

: 30; 45; 60

Days to Ship	All 4 Day(s) or Less 6 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 13 Day(s) or Less 14 Day(s) or Less 16 Day(s) or Less 18 Day(s) or Less 32 Day(s) or Less

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

CAD ：

2D / 3D

Days to Ship: Quote
Vacuum Assist Valve ZP2V Series

SMC

A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series

SMC

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

CAD ：

2D / 3D

Days to Ship: Quote

Days to Ship:	Quote

Days to Ship:	32 Day(s) or more

Days to Ship:	Quote

Automatic Butterfly Valve/BV-NII Series

FUJITECHNOLOGY

It can be operated with the degree of opening at 2 different positions, 0 to 45° and 90°.

Standard Price:	SGD 1,672.48
Days to Ship:	18 Day(s) or more

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more

Days to Ship:	32 Day(s) or more

Butterfly Valve/AXOII Series

FUJITECHNOLOGY

It has a 2-year warranty for 1,000,000 open and close.

Standard Price:	SGD 1,262.25-
Days to Ship:	18 Day(s) or more

High Vacuum Air Operated Valve AVB*17 Series

CKD

Durable with a long service life. NC type. Light and compact thanks to adoption of aluminum alloy body.

CAD ：: 2D

Standard Price:	SGD 743.04-
Days to Ship:	9 Day(s) or more

High-Vacuum Angle Valve (Multi-Action / Single-Action)

IRIE KOKEN

[Features]
· The vacuum side valve material is completely made up of stainless steel (SUS).
· The entire unit is made small and lightweight by the compact design.
· There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
· Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
· The functional design results in large conductance.
· It has a single-side rotating flange, so installation is easy (ConFlat flange).

Standard Price:	SGD 507.75-
Days to Ship:	4 Day(s) or more


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	FUJITECHNOLOGY	SMC	FUJITECHNOLOGY	CKD	IRIE KOKEN
Product Series	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Vacuum Assist Valve ZP2V Series	Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series	Automatic Butterfly Valve/BV-NII Series	Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series	Butterfly Valve/AXOII Series	High Vacuum Air Operated Valve AVB*17 Series	High-Vacuum Angle Valve (Multi-Action / Single-Action)
CAD	2D / 3D	2D / 3D	2D / 3D		2D / 3D		2D
Days to Ship	Quote	32 Day(s) or more	Quote	18 Day(s) or more	32 Day(s) or more	18 Day(s) or more	9 Day(s) or more	4 Day(s) or more
Type	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve	Air-Actuated Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	-	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct	Direct	Direct	-	Direct
Number of Ports	2-Port Valve	2-Port Valve	3-Port Valve	-	2-Port Valve	-	-	2-Port Valve
Solenoid Type	-	-	Single	-	-	-	-	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	Others	2-Position Normally Closed	Others	2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed / Others
Driving Type	-	-	-	-	-	-	-	Directly Operated
Effective Sectional Area(mm2)	-	0.07 ～ 0.78	-	-	-	-	-	-
Pipe Port Type	Flange	M / Rc / NPT / One-Touch Plumbing	Flange	Flange	Flange	Flange	-	Flange
Plumbing Thread Nominal	-	M5 / 1/8 / M6 / M8	-	-	-	-	-	-
Connecting Tube Diameter	-	Ø4 / Ø6	-	-	-	-	-	-
Flange Type	KF / K	-	NW / Others	ISO	NW / Others	NW / JIS / ISO / Others	-	NW
Flange Nominal	25 / 40 / 50 / 63 / 80	-	16 / 25 / 40 / 50 / 63 / 80	32	16 / 25 / 40 / 50 / 63 / 80	80 / 100 / 150 / 32 / 65 / 52	-	16 / 25 / 40 / 50
CV Value	-	0.0037940379 ～ 0.0422764228	-	-	-	-	-	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
Clear