(!)Due to Microsoft's end of support for Internet Explorer 11 on 15/06/2022, this site does not support the recommended environment.
Instead, please kindly use other browsers like Google Chrome, Microsoft Edge or Mozilla Firefox.

7 Million Products, 2,000 Brands.
50,000 Stock items for Same Day Ship Out.

All Categories

Search by Application

inCAD Library

Brands

Brand List

Webcode Seach | Series: #CODE

Keyword suggestions

Part number suggestions

Discontinued Products

Scheduled Maintenance Notice: This site will be unavailable due to scheduled maintenance from 9:00 9/2/2025 to 7:00 (SGT) 10/2/2025. We apologize for the inconvenience.
Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

How can we improve?

How can we improve?

Feedback

Name (Optional)

E-mail Address (Optional)

Tel (Optional)

Thank you for your time.
Your feedback is essential for our continuous improvement
Privacy Policy

Thank you for your cooperation.

Thank you for your time.
Your feedback is essential for our continuous improvement
Please use the inquiry form.

Privacy Policy

Vacuum Valves（Driving Type：Directly Operated）

Vacuum valves are a type of valve attached to vacuum chambers. Vacuum valves must block gas components almost completely or must be precisely controlled compared with regular valves.
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.

6 items

: 30; 45; 60

Days to Ship	All 3 Day(s) or Less 4 Day(s) or Less 5 Day(s) or Less 6 Day(s) or Less 7 Day(s) or Less 8 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less 13 Day(s) or Less

Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

SMC

A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃

CAD ：

2D / 3D

Days to Ship: 32 Day(s) or more
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: Quote
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

SMC

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

CAD ：

2D / 3D

Days to Ship: 41 Day(s) or more

Days to Ship:	32 Day(s) or more

Days to Ship:	Quote

Days to Ship:	Quote

Days to Ship:	41 Day(s) or more

《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series

KOGANEI

In response to various control needs, the manufacturer has newly added positive pressure / always open specifications and vacuum specifications. The ideal control system for machines and equipment on the production line can now be selected.

Standard Price:	SGD 58.99-
Days to Ship:	14 Day(s) or more

High-Vacuum Angle Valve (Multi-Action / Single-Action)

IRIE KOKEN

[Features]
· The vacuum side valve material is completely made up of stainless steel (SUS).
· The entire unit is made small and lightweight by the compact design.
· There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
· Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
· The functional design results in large conductance.
· It has a single-side rotating flange, so installation is easy (ConFlat flange).

Standard Price:	SGD 507.75-
Days to Ship:	4 Day(s) or more


Brand
Product Series
CAD
Days to Ship
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value


Brand	SMC	SMC	SMC	SMC	KOGANEI	IRIE KOKEN
Product Series	Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)	《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series	High-Vacuum Angle Valve (Multi-Action / Single-Action)
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Days to Ship	32 Day(s) or more	Quote	Quote	41 Day(s) or more	14 Day(s) or more	4 Day(s) or more
Type	High Vacuum Solenoid	High Vacuum Solenoid	High Vacuum Solenoid	Solenoid Valve	Solenoid Valve	Air-Actuated Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use	Single Use / Multi-Port	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct	Direct / Manifold Base	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve / 3-Port Valve	2-Port Valve
Solenoid Type	Single	Single	Single	Single	Single	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed / Others
Driving Type	Directly Operated	Directly Operated	Directly Operated	Directly Operated	Directly Operated	Directly Operated
Effective Sectional Area(mm2)	-	-	-	-	0.1 ～ 0.45	-
Pipe Port Type	Rc / NPT / Face Seal Fitting / Compression Fitting	Flange	Flange	Flange	M	Flange
Plumbing Thread Nominal	1/8 / 1/4 / 3/8	-	-	-	M5 / M3	-
Connecting Tube Diameter	-	-	-	-	-	-
Flange Type	-	KF / K	KF / K	KF	-	NW
Flange Nominal	-	16 / 25 / 40 / 50 / 63 / 80	25 / 40 / 50 / 63 / 80	16 / 25	-	16 / 25 / 40 / 50
CV Value	-	-	-	-	0.006 ～ 0.025	-

Configure

Specification/Dimensions

Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
Clear